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New product AccuPro Series SMIF Pod Opener Resist coat Cleaner Patterning Manufacturing process of the Photomask

 

SMIF Pod Opener

You could substatialy shorten working time by quite easy mount and dismount process, also particle creation because of human presense would be satisfactorily eliminated.



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Packer -Stand Alone Type-

for Entegris RSP-200 & M200
Packer stand alone type
Packer IL

for Entegris RSP-200 & M200
Packer IL
KaizerII

for Entegris RSP-200 & M200

KaizerII
Kaizer150

for Entegris RSP-150

KaizerII
Packer-isai

This tool's actions are:
1. Pick up a Mask/Reticle plate from SMIFpod
2. Rotate and/or Flip the plate
3. Return it to SMIFpod or Load to another Mask case

 


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